DocumentCode
288222
Title
Microelectronics and microengineering: the technology combination of the future
Author
Young, D.C.
Author_Institution
Southampton Univ., UK
fYear
1994
fDate
34389
Firstpage
42370
Lastpage
42371
Abstract
The technology for complete integration of transducers, electronic measurement system and actuators on a single chip already exists, though microengineering is still in its infancy and development of a complete system on a chip will pass through a logical sequence. First generation systems will likely consist of separate sensor, actuator and electronic chips perhaps mounted in the same header. Sensors with some on board electronics have already been demonstrated and complete system chips will be developed in the forseeable future
Keywords
electric sensing devices; integrated circuit technology; micromechanical devices; actuators; electronic measurement system; first generation systems; microengineering; on board electronics; sensor chips; transducers;
fLanguage
English
Publisher
iet
Conference_Titel
Application Specific Integrated Circuits for Measurement Systems, IEE Colloquium on
Conference_Location
London
Type
conf
Filename
369875
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