• DocumentCode
    288222
  • Title

    Microelectronics and microengineering: the technology combination of the future

  • Author

    Young, D.C.

  • Author_Institution
    Southampton Univ., UK
  • fYear
    1994
  • fDate
    34389
  • Firstpage
    42370
  • Lastpage
    42371
  • Abstract
    The technology for complete integration of transducers, electronic measurement system and actuators on a single chip already exists, though microengineering is still in its infancy and development of a complete system on a chip will pass through a logical sequence. First generation systems will likely consist of separate sensor, actuator and electronic chips perhaps mounted in the same header. Sensors with some on board electronics have already been demonstrated and complete system chips will be developed in the forseeable future
  • Keywords
    electric sensing devices; integrated circuit technology; micromechanical devices; actuators; electronic measurement system; first generation systems; microengineering; on board electronics; sensor chips; transducers;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Application Specific Integrated Circuits for Measurement Systems, IEE Colloquium on
  • Conference_Location
    London
  • Type

    conf

  • Filename
    369875