Title :
Guided Wave Optical MEMS Pressure Sensor
Author :
Pattnaik, Prasant Kumar ; Selvarajan, A. ; Srinivas, T.
Author_Institution :
Dept. of Electr. Commun. Eng., Indian Inst. of Sci.
Abstract :
Guided wave optics in combination with micro-machining technology offer immense potential for sensor applications. In this paper we analyse an guided wave optics based MEMS pressure sensor consisting of a Mach-Zehnder interferometer whose sensing arm is over the edge of a bulk micromachined silicon diaphragm. We compare this sensor utilising the elasto-optic effect with the conventional piezo-resistive and capacitive micromachined pressure sensors in terms of their sensitivities. This MOEM pressure sensor is found to be superior to the conventional ones. This sensor can be used for blood pressure monitoring, precision instrumentation, aerospace propulsion application with suitable design parameters
Keywords :
Mach-Zehnder interferometers; micro-optics; micromachining; microsensors; optical sensors; optical waveguides; pressure sensors; Mach-Zehnder interferometer; aerospace propulsion; blood pressure monitoring; elasto-optic effect; guided wave optics; micro-opto-electro-mechanical devices; micromachining technology; precision instrumentation; pressure sensor; Aerospace electronics; Biomedical monitoring; Blood pressure; Capacitive sensors; Condition monitoring; Instruments; Micromechanical devices; Optical interferometry; Optical sensors; Silicon;
Conference_Titel :
Sensors for Industry Conference, 2005
Conference_Location :
Houston, TX
Print_ISBN :
1-4244-0298-0
DOI :
10.1109/SICON.2005.257881
