Title :
Field emission properties of nano-layered carbon lateral edge emitters
Author :
Kumar, N. ; Hellmer, R. ; Mueller, M. ; Eaton, M. ; Browning, J.
Author_Institution :
Stellar Micro Devices, Inc., Austin, TX, USA
Abstract :
Summary form only given. In this presentation, field emission properties of nano layered carbon (NLC) lateral edge emitters will be presented. During this study, the diamond like carbon films were fabricated with pulse laser deposition process using a 1.8 joule Q-switched Nd:YAG laser. The number of nano layers was varied from 4 to 16. The thickness was varied from 2.5nm to 10nm. These NLC emitter layers were patterned into triode edge emitters using standard photolithography process and their field emission properties were studied under high vacuum conditions. Identical emitters were fabricated on substrates of different thermal conductivities to study the thermal heating effects. Under optimum conditions, single tip currents as high as 200 micro-amps have been measured.
Keywords :
diamond-like carbon; field emission; nanolithography; nanostructured materials; photolithography; pulsed laser deposition; thin films; C; NLC emitter layers; Q-switched Nd:YAG laser; current 200 muA; diamond like carbon films; energy 1.8 J; field emission properties; high vacuum conditions; nanolayered carbon lateral edge emitters; photolithography process; pulse laser deposition process; single tip currents; size 2.5 nm to 10 nm; thermal conductivities; thermal heating effects; triode edge emitters; Carbon dioxide; Switches;
Conference_Titel :
Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-61284-330-8
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2011.5993136
