Title :
Performance of 5 × 5 arrays of Al/Al2O3 microcavity plasma jet devices: Spatially resolved optical emission profiles in He flow
Author :
Cho, J.H. ; Jeon, J.K. ; Jeon, J.Y. ; Park, S. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
Abstract :
Summary form only given. Arrays of microplasma jets have been fabricated in microcavities having cylindrical or double parabolic cross-section. The typical diameter of these microcavities is 250-300 μm and the depth of the entire device is ~250 μm. Fabricated by micromachining of nanoporous alumina grown on Al foil1, the plasma jet devices were operated with a feedstock gas having a flow rate of 1~7 standard L/min. Arrays as large as 5 × 5 jets have been demonstrated for which the jet length and array pitch are up to 3 mm and 100 μm, respectively. Images of the visible fluorescence produced by the expansion of He microplasma jets in laboratory air provide a vivid picture of the extent of the He (23S)+ → N2+ Penning ionization reaction zone.
Keywords :
Penning ionisation; alumina; aluminium; fluorescence; helium; microcavities; micromachining; nanoporous materials; plasma diagnostics; plasma flow; plasma jets; visible spectra; Penning ionization reaction zone; array pitch; cylindrical cross-section; double parabolic cross-section; feedstock gas; helium flow; microcavity plasma jet devices; micromachining; nanoporous alumina; size 100 mum; size 250 mum to 300 mum; size 3 mm; spatially resolved optical emission profiles; visible fluorescence images; Aluminum oxide; Helium; Image motion analysis; Microcavities; Nanoscale devices; Plasmas;
Conference_Titel :
Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-61284-330-8
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2011.5993249
