Title :
Extraction of Self-Heating Free I-V Curves Including the Substrate Current of PD SOI MOSFETs
Author :
Chen, Qiang ; Wu, Zhi-Yuan ; Su, Richard Y K ; Goo, Jung-Suk ; Thuruthiyil, Ciby ; Radwin, Martin ; Subba, Niraj ; Suryagandh, Sushant ; Ly, Tran ; Wason, Vineet ; An, Judy X. ; Icel, Ali B.
Author_Institution :
Adv. Micro Devices, Sunnyvale
Abstract :
A new methodology is proposed to extract self-heating free I-V curves, including the substrate current, of SOI MOSFETs based on triple-temperature, regular DC measurement. It is verified to be accurate with Hspice simulations and suitable for SPICE model parameter extraction. It is also demonstrated that extraction of self-heating free I-V curves is not only desired for efficient SPICE model generation, but also required to accurately capture the true temperature dependences in the models.
Keywords :
MOSFET; SPICE; electric current; partial discharges; quality assurance; semiconductor device models; silicon-on-insulator; thermal conductivity; Hspice simulations; PD SOI MOSFET; SPICE model parameter extraction; regular DC measurement; self-heating free I-V curves extraction; substrate current; temperature dependency; Current measurement; Curve fitting; MOSFETs; Parameter extraction; Pulse measurements; SPICE; Semiconductor device modeling; Temperature dependence; Thermal resistance; Voltage; Compact modeling; SOI; self-heating; substrate current;
Conference_Titel :
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
1-4244-0781-8
Electronic_ISBN :
1-4244-0781-8
DOI :
10.1109/ICMTS.2007.374498
