Title :
A 400mm long linear X-ray sensitive image sensor
Author :
Sevenhans ; Claeys, Cor ; Debusschere, I. ; Declerck, G.
Author_Institution :
Interuniversity Microelectronic V. Center, Leuven, Belgium
Abstract :
A solid-state X-ray sensitive diode array with on-chip serial readout circuitry will be reported. The sensor consists of 128 diodes on a pitch of 400μm. Die size is 50×4mm. Device operates at a 1MHz pixel rate and achieves a sensitivity of 2.3nA/mm2for a tungsten tube at 100KeV and 9mA cathode current.
Keywords :
Circuit noise; Decoding; Detectors; Diodes; Image sensors; Photodiodes; Sensor arrays; Silicon; Switches; X-ray imaging;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1987 IEEE International
Conference_Location :
New York, NY, USA
DOI :
10.1109/ISSCC.1987.1157125