Title :
Morphological changes of electron-beam irradiated PMMA surface
Author :
Nathawat, Rashi ; Kumar, Anil ; Vijay, Y.K.
Author_Institution :
Univ. of Rajasthan, Jaipur
Abstract :
Atomic force microscopy (AFM) study of low energy (10 keV) electron beam irradiated polymethylmethacrylate (PMMA) surface was performed. PMMA thin film of (20 mum), were used in lithography technique. AFM in tapping mode has been utilized to investigate the morphological changes on the surfaces of sample as a function of fluence. TM-AFM showed the hills of the nano size surrounded by crater type features in all irradiated samples. The root-mean-square (rms) surface roughness of the samples changed from 2.666 nm to 5.617 nm with fluence from 2times1014 e/cm2 to 1times1016 e/cm2. It shows that roughness increases with fluence.
Keywords :
atomic force microscopy; electron beam effects; electron-surface impact; nanolithography; polymers; surface morphology; surface roughness; thin films; PMMA surface; PMMA thin film; atomic force microscopy; crater type features; electron volt energy 10 keV; electron-beam irradiated surface; fluence; lithography technique; low energy electron beam; morphology; nano size hills; polymethylmethacrylate; size 20 mum; surface roughness; tapping mode; Atomic force microscopy; Electron accelerators; Electron beams; Ion implantation; Lithography; Polymer films; Probes; Rough surfaces; Surface morphology; Surface roughness;
Conference_Titel :
Particle Accelerator Conference, 2007. PAC. IEEE
Conference_Location :
Albuquerque, NM
Print_ISBN :
978-1-4244-0916-7
DOI :
10.1109/PAC.2007.4440562
