GEMS: a generic equipment maintenance system

Author

Chang, Norman H. ; Rothe, Peter

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1989

fDate

22-24 May 1989

Firstpage

78

Lastpage

81

Abstract

GEMS, a system that provides the framework for application-specific equipment maintenance tools, is described with reference to the user interface, the knowledge acquisition process and knowledge scope, the reasoning strategy, and the collective feedback from the end users. GEMS is designed to assist operators in conducting down-time maintenance/equipment diagnosis, to provide a training tool for new equipment maintenance engineers or equipment operators, and to relieve the equipment fire-fighting burden from equipment maintenance engineers. The system is built in an object-oriented programming environment provided by KEE, a commercial expert system shell, operating on a SUN 3/60. A GEMS applied to diffusion furnace was demonstrated and received very good response from the end users

Keywords

integrated circuit manufacture; knowledge based systems; maintenance engineering; GEMS; KEE; SUN 3/60; application-specific equipment maintenance tools; commercial expert system shell; diffusion furnace; downtime maintenance; equipment diagnosis; equipment maintenance engineers; equipment operators; feedback from end users; generic equipment maintenance system; knowledge acquisition process; knowledge scope; object-oriented programming environment; reasoning strategy; training tool; user interface; Diagnostic expert systems; Furnaces; Graphics; Knowledge engineering; Object oriented programming; Processor scheduling; Production; Sun; User interfaces; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Science Symposium, 1989. ISMSS 1989., IEEE/SEMI International

Conference_Location

Burlingame, CA

Type

conf

DOI

10.1109/ISMSS.1989.77249

Filename

77249