Title :
Application of Pulsed Digital Oscillators in `reverse mode´ to eliminate undesired vibrations in high-Q MEMS resonators
Author :
Domìnguez, Manuel ; Pons, Joan ; Ricart, Jordi
Author_Institution :
Dept. of Electron. Eng., Tech. Univ. of Catalonia, Barcelona
Abstract :
A new ´reverse mode´ for pulsed digital oscillators is proposed that cancels out unwanted vibrations in high-Q MEMS resonators. For a given resonator, PDOs may present two opposed behaviours, depending on the sign of the feedback signal and the sampling frequency: a) the feedback signal may force oscillations, or b) it can cancel out the oscillations reaching a limit orbit near the origin. This second behaviour can actually be used to cancel out unwanted vibrations. Theory and simulations results are presented. The case study considered is one in which the resonator has been hit and therefore it has suddenly increased its velocity.
Keywords :
micromechanical resonators; oscillators; feedback signal; high-Q MEMS resonators; pulsed digital oscillators; sampling frequency; Circuits; Electric variables; Force feedback; Frequency; Microelectromechanical devices; Micromechanical devices; Oscillators; Sampling methods; Transfer functions; Vibrations;
Conference_Titel :
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location :
New Orleans, LA
Print_ISBN :
1-4244-0920-9
Electronic_ISBN :
1-4244-0921-7
DOI :
10.1109/ISCAS.2007.378077