DocumentCode
2893545
Title
Application of Pulsed Digital Oscillators in `reverse mode´ to eliminate undesired vibrations in high-Q MEMS resonators
Author
Domìnguez, Manuel ; Pons, Joan ; Ricart, Jordi
Author_Institution
Dept. of Electron. Eng., Tech. Univ. of Catalonia, Barcelona
fYear
2007
fDate
27-30 May 2007
Firstpage
925
Lastpage
928
Abstract
A new ´reverse mode´ for pulsed digital oscillators is proposed that cancels out unwanted vibrations in high-Q MEMS resonators. For a given resonator, PDOs may present two opposed behaviours, depending on the sign of the feedback signal and the sampling frequency: a) the feedback signal may force oscillations, or b) it can cancel out the oscillations reaching a limit orbit near the origin. This second behaviour can actually be used to cancel out unwanted vibrations. Theory and simulations results are presented. The case study considered is one in which the resonator has been hit and therefore it has suddenly increased its velocity.
Keywords
micromechanical resonators; oscillators; feedback signal; high-Q MEMS resonators; pulsed digital oscillators; sampling frequency; Circuits; Electric variables; Force feedback; Frequency; Microelectromechanical devices; Micromechanical devices; Oscillators; Sampling methods; Transfer functions; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location
New Orleans, LA
Print_ISBN
1-4244-0920-9
Electronic_ISBN
1-4244-0921-7
Type
conf
DOI
10.1109/ISCAS.2007.378077
Filename
4252787
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