DocumentCode :
2898311
Title :
Counter streaming beams model in MICHELLE eBEAM
Author :
Ovtchinnikov, Serguei ; Cooke, Simon ; Mkrtchyan, Masis ; Shtokhamer, Roman ; Vlasov, Alexander ; Petillo, John ; Levush, Baruch
Author_Institution :
Sci. Applic. Int´´l Corp., Billerica, MA, USA
fYear :
2012
fDate :
24-26 April 2012
Firstpage :
199
Lastpage :
200
Abstract :
Simulation of counter streaming charged particle beams, where two beams are co-located in space while propagating in opposite directions, has many applications ranging from the lower current electron beam lithography regime to the higher current Free Electron Laser (FEL) regime. Modeling such counter streaming beams presents different computational challenges depending on the specific device being modeled. Applications of interest require in some cases the model of both global and stochastic space charge; the latter requires direct evaluation of Coulomb interactions. A new approach implemented in MICHELLE-eBEAM is designed to take advantage of the GPU hardware acceleration and novel algorithms to capture such inter-particle interactions efficiently. In this paper we report on our latest progress and show for a high current electron beam lithography application the achieved accuracy and performance of the new code.
Keywords :
electron beam lithography; free electron lasers; graphics processing units; space charge; Coulomb interaction; FEL regime; GPU hardware acceleration; MICHELLE eBEAM; counter streaming beams model; counter streaming charged particle beam; current electron beam lithography; free electron laser; global space charge; interparticle interaction; stochastic space charge; Accuracy; Computational modeling; Laser beams; Lithography; Particle beams; Radiation detectors; Weapons; Coulomb interaction; GPU; counter streaming; lithography; stochastic space charge;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0188-6
Electronic_ISBN :
978-1-4673-0187-9
Type :
conf
DOI :
10.1109/IVEC.2012.6262128
Filename :
6262128
Link To Document :
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