Title :
Absolute measurement of nanometer displacement with Fabry-Perot interferometry
Author :
van den Berg, S.A. ; van Kan, P.J.M. ; Bergmans, R.H.
Author_Institution :
Nederlands Meetinstituut, Delft, Netherlands
Abstract :
Fabry-Perot interferometry is a powerful technique for the measurement of extremely small displacements. We have developed a Fabry-Perot interferometer for the calibration of displacement sensors with nanometer accuracy, in order to provide direct traceability of such sensors to the primary standard of length. In conclusion, the Fabry-Perot interferometer provides the possibility to calibrate nanosensors. like capacitive and inductive sensors, with nm accuracy.
Keywords :
Fabry-Perot interferometers; calibration; capacitive sensors; displacement measurement; light interferometry; Fabry-Perot interferometry; capacitive sensor; displacement sensors calibration; inductive sensor; nanometer accuracy; nanometer displacement measurement; nanosensor calibration; Calibration; Diode lasers; Displacement measurement; Fabry-Perot interferometers; Frequency measurement; Interferometry; Mirrors; Resonant frequency; Standards development; Tunable circuits and devices;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568216