Title :
A heterodyne interferometric ellipsometer
Author :
Watkins, Lionel R. ; Hoogerland, Maarten D.
Author_Institution :
Dept. of Phys., Auckland Univ., New Zealand
Abstract :
Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.
Keywords :
ellipsometers; ellipsometry; light interferometry; light sources; semiconductor lasers; bias current modulation; heterodyne interferometric ellipsometer; inexpensive semiconductor laser diode; optical property; optical source; temporal fringes; Arm; Atomic measurements; Diode lasers; Glass; Instruments; Optical films; Optical interferometry; Optical polarization; Refractive index; Voltage;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568231
