Title :
Surface profile measurement by using stabilized polarization interferometer module
Author :
Liu, Zhen ; Kim, Hyun Su ; Park, Jong Rak ; Kim, Jin-Tae
Author_Institution :
Dept. of Appl. Photonic Eng., Chosun Univ., Gwangju, South Korea
Abstract :
In this paper, we used the polarization interferometer for the surface measurements with stabilized interferometer module the polarizing beamsplitters, waveplates, etc. So we get four shifted interference patterns (0°, 90°, 180°, 270°). The stabilized He-Ne laser was used for the this measurement. The profile measurements from the interference pattern by using Twyman-Green interferometer has been done by using mathcad and FFT method.
Keywords :
fast Fourier transforms; gas lasers; helium; laser stability; light interferometry; light polarisation; measurement by laser beam; neon; optical beam splitters; optical retarders; surface topography measurement; FFT; He-Ne; He-Ne laser; Twyman-Green interferometer; interference pattern; mathcad; polarizing beamsplitter; stabilized polarization interferometer; surface profile measurement; waveplate; Electronic mail; Interference; Laser stability; Optical interferometry; Optical retarders; Optical surface waves; Phase measurement; Polarization; Surface waves; Vibration measurement;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1568246
