Neutral pressure effects on ionization characteristics of electron cyclotron resonance discharge

Author

Jin, Xiaolin ; Yang, Zhonghai ; Huang, Tao ; Zhu, Xiaofang ; Li, Jianqing ; Li, Bin

Author_Institution

Sch. of Phys. Electron., Univ. of Electron. Sci. & Technol. of China, Chengdu, China

fYear

2011

fDate

21-24 Feb. 2011

Firstpage

377

Lastpage

378

Abstract

The code with quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision (PIC/MCC) method is developed for the research of ionization process of argon electron cyclotron resonance (ECR) discharge. Monte Carlo techniques are used on a large ensemble of charged particles to ensure accurate representation of the stochastic process. Recent work has focused on the effects of neutral pressure on the characteristics of ECR discharge and ECR plasma.

Keywords

Monte Carlo methods; argon; cyclotron resonance; high-frequency discharges; ionisation; plasma collision processes; plasma pressure; plasma simulation; stochastic processes; ECR discharge; ECR plasma; Monte Carlo collision method; PIC-MCC method; argon electron cyclotron resonance discharge; charged particle; ionization process; neutral pressure effect; quasithree-dimensional electromagnetic particle-in-cell method; stochastic process; Cyclotrons; Discharges; Electromagnetic fields; Ionization; Magnetic fields; Monte Carlo methods; Plasmas; Monte Carlo collision; electron cyclotron resonance discharge; electron cyclotron resonance plasma; ionization; particle-in-cell;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Electronics Conference (IVEC), 2011 IEEE International

Conference_Location

Bangalore

Print_ISBN

978-1-4244-8662-5

Type

conf

DOI

10.1109/IVEC.2011.5747033

Filename

5747033