Object oriented modelling of different knowledge domains inside the LIGA-Process

For manufacturing of micromechanical structures, the LIGA-Process, developed at the KfK is an important method. The complexity of this process needs the investment of different special knowledge domains, respected by the different experts involved in the whole development process. On the logical top level the whole LIGA-Process is represented as a chain of many process steps of different types. They may be distinguished qualitatively between the design step at the beginning (realized by a CAD-system for mechanical constructions), the different fabrication steps and finally some inspection steps, which can be realized by a measurement system