Properties of solution TMITM as an OMVPE source

Solid trimethylindium (TMI) is the precursor of choice for the vast majority of MOVPE applications. However consistent pick up has been a problem under normal operating conditions. Epichem´s solutions to this problem have included solution TMI^TM (TMI suspended in a high boiling point amine adducted to TMI) and dual reverse flow bubblers of solid TMI. A detailed investigation of solution TMI^TM is being continued at Epichem in order to understand the chemical and physical properties of this indium source. Results have proved solution TMI to have a more consistent `pick up´ than any alternative method and it has been identified as the best precursor for low oxygen applications