DocumentCode :
2908370
Title :
Improved luminescence from InGaAsP/InP MQW active regions using a wafer fused superlattice barrier
Author :
Black, K.A. ; Abraham, P. ; Karim, A. ; Bowers, J.E. ; Hu, E.L.
Author_Institution :
Dept. of Mater., California Univ., Santa Barbara, CA, USA
fYear :
1999
fDate :
1999
Firstpage :
357
Lastpage :
360
Abstract :
This paper investigates the luminescence properties of InP/InGaAsP multiple quantum well (MQW) laser active regions. Room temperature photoluminescence studies were performed on doped and undoped active regions before fusion, after fusion, after thermal cycling, and after rapid thermal annealing. It is shown that quantum well luminescence intensity degrades considerably after wafer fusion. The introduction of a superlattice defect blocking layer at the fusing surface of the MQW active region not only prevents degradation of the luminescence, but actually improves the luminescence of the MQW active region through the fusion process by a factor of four
Keywords :
III-V semiconductors; gallium arsenide; gallium compounds; indium compounds; photoluminescence; quantum well lasers; rapid thermal annealing; semiconductor superlattices; spectral line intensity; wafer bonding; InGaAsP-InP; InGaAsP/InP MQW active regions; InP/InGaAsP multiple quantum well; doped active regions; laser active regions; luminescence; quantum well luminescence intensity; rapid thermal annealing; room temperature photoluminescence; superlattice defect blocking layer; thermal cycling; undoped active regions; wafer fused superlattice barrier; Indium phosphide; Laser fusion; Luminescence; Photoluminescence; Quantum well devices; Quantum well lasers; Rapid thermal annealing; Superlattices; Temperature; Thermal degradation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1999. IPRM. 1999 Eleventh International Conference on
Conference_Location :
Davos
ISSN :
1092-8669
Print_ISBN :
0-7803-5562-8
Type :
conf
DOI :
10.1109/ICIPRM.1999.773708
Filename :
773708
Link To Document :
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