Title :
Scanning Near-Field Optical Lithography
Keywords :
Atom optics; Atomic force microscopy; Lithography; Nanofabrication; Nanostructured materials; Optical materials; Optical microscopy; Optical surface waves; Surface topography; Tungsten;
Conference_Titel :
Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on
Conference_Location :
Hamburg, Germany
Print_ISBN :
0-7803-3169-9
DOI :
10.1109/CLEOE.1996.562553
