DocumentCode
2909133
Title
A tutorial on laser interferometry for precision measurements
Author
Loughridge, Russell ; Abramovitch, Daniel Y.
Author_Institution
Nano Position & Meas. Div., Agilent Technol., Cleveland, OH, USA
fYear
2013
fDate
17-19 June 2013
Firstpage
3686
Lastpage
3703
Abstract
Laser interferometers have found wide usage in a variety of precision measurement applications. The ability to gain precise position information with minimal change to the dynamics of the device being measured has a large set of advantages. This allows interferometer systems to be used in feedback loops for precision systems. This paper presents a tutorial on laser interferometers, their use in precision motion feedback systems, the issues faced by such systems, and some of the solutions that have been applied to these issues.
Keywords
Michelson interferometers; light interferometry; position measurement; feedback loops; laser interferometers; laser interferometry; precision measurements; precision motion feedback systems; Detectors; Interference; Interferometers; Laser beams; Measurement by laser beam; Mirrors; Vectors;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference (ACC), 2013
Conference_Location
Washington, DC
ISSN
0743-1619
Print_ISBN
978-1-4799-0177-7
Type
conf
DOI
10.1109/ACC.2013.6580402
Filename
6580402
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