DocumentCode
2909236
Title
Recent trends in bulk acoustic wave resonator sensors
Author
Hauptmann, Peter ; Lucklum, Ralf ; Schröder, Jens
Author_Institution
Inst. for Micro-& Sensor Syst., Magdeburg Univ., Germany
Volume
1
fYear
2003
fDate
5-8 Oct. 2003
Firstpage
56
Abstract
Devices based on piezoelectric materials, which allow transduction between electrical and acoustic energies, have been developed in a number of configurations for sensor applications and materials characterization. Bulk acoustic wave resonators like QCM and ultrasonic sensors can be classified in the category of acoustic wave resonators sensors. The latter will not be considered here. In the following the state-of-the-art of bulk acoustic wave resonator sensors will be discussed. Models for the description of the transduction mechanisms of acoustic-wave based chemical or biochemical sensors are introduced and compared to derive the application chance and limitations of these sensors. The importance of suitable sensor interface electronics for getting exact sensor data in damping fluid systems will be shown. In this context the signal-to-noise-ratio (SNR) plays a dominant role. Selected application examples are given. Aspects of future trends are discussed.
Keywords
bulk acoustic wave devices; crystal resonators; microbalances; multilayers; piezoelectric materials; piezoelectric transducers; quartz; surface acoustic wave resonators; surface acoustic wave sensors; surface acoustic wave transducers; SiO2; acoustic energies; acoustic wave resonator sensors; biochemical sensors; chemical sensors; damping fluid systems; electrical energies; microbalances; multilayers; piezoelectric materials; sensor interface electronics; signal-noise ratio; transduction; Acoustic applications; Acoustic devices; Acoustic materials; Acoustic sensors; Acoustic waves; Biosensors; Chemical and biological sensors; Piezoelectric materials; Sensor phenomena and characterization; Sensor systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN
0-7803-7922-5
Type
conf
DOI
10.1109/ULTSYM.2003.1293356
Filename
1293356
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