Title :
Thickness vibrations of flat piezoelectric plates with massy electrodes of unequal thickness
Author :
Kosinski, John A.
Author_Institution :
US Army RDECOM CERDEC, Ft. Monmouth, NJ, USA
Abstract :
We develop a set of six coupled equations governing the modal amplitudes and phase angles (mode-center offsets) for the flat, piezoelectric plate resonator with massy electrodes of unequal thickness. The case of the AT-cut resonator is used to obtain a set of transcendental equations describing the resonance frequencies and phase angles of an isolated single mode. These show that the phase angle (and corresponding even mode amplitude) is proportional to the electrode mass-loading imbalance, and for a given total electrode mass-loading, the resonance frequencies depend also on the electrode mass imbalance.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal resonators; modal analysis; piezoelectric materials; plates (structures); vibrations; AT-cut resonator; acoustic resonators; electrode mass loading imbalance; massy electrodes; modal amplitudes; phase angles; piezoelectric plate resonator; resonance frequencies; six coupled equations; thickness vibrations; transcendental equations; Acceleration; Acoustic waves; Boundary conditions; Electrodes; Equations; Resonance; Resonant frequency; Steady-state;
Conference_Titel :
Ultrasonics, 2003 IEEE Symposium on
Print_ISBN :
0-7803-7922-5
DOI :
10.1109/ULTSYM.2003.1293358