Title :
RF testing of MEMS components
Author :
Deakin, D. ; DeNatale, Jeffrey ; Higgins, J. ; Mihailovich, R. ; Park, S. ; Pascal, M. ; Richardson, P. ; Pollock, G. ; Sailer, A. ; Sovero, E. ; Studer, J. ; Sullivan, G. ; Tran, L. ; Waldrop, J. ; Wang, A. ; Yao, J. ; Anderson, G. ; Erlandson, R.
Author_Institution :
Rockwell Sci. Center, Thousand Oaks, CA, USA
Abstract :
The authors discuss some of the testing issues associated with the RF characterization of MEMS components. More specifically, they present testing methods and experimental results for two RF MEMS components-an RF switch and a tunable capacitor. RF measurements including insertion loss, electrical isolation, linearity, and vibration sensitivity are among the MEMS characteristics to be presented, as are the electromechanical measurements including response time, actuation characteristics, and contact wear
Keywords :
capacitors; characteristics measurement; electric variables measurement; electronic equipment testing; micromechanical devices; radio equipment; switches; telecommunication equipment testing; MEMS characteristics; MEMS components; RF MEMS components; RF switch; RF testing; actuation characteristics; contact wear; electrical isolation; electromechanical measurements; insertion loss; linearity; response time; tunable capacitor; vibration sensitivity; Capacitors; Electric variables measurement; Loss measurement; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Testing; Time measurement; Vibration measurement;
Conference_Titel :
AUTOTESTCON '98. IEEE Systems Readiness Technology Conference., 1998 IEEE
Conference_Location :
Salt Lake City, UT
Print_ISBN :
0-7803-4420-0
DOI :
10.1109/AUTEST.1998.713438
