Title :
Micro tri-axial force sensor for 3D bio-micromanipulation
Author :
Arai, Fumihito ; Sugiyama, Tomohiko ; Fukuda, Toshio ; Iwata, Hitoshi ; Itoigawa, Kouichi
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
It is important to manipulate a biological small object, such as a cell and embryo. Three-dimensional high speed micromanipulation is needed as a fundamental technology for biology and bio-engineering application. In this paper, we focus on the contact type micromanipulation in the liquid. We designed and made a contact type micromanipulation system which has a 3-DOF narrow range positioning system on a 3-DOF wide range positioning system. We developed a micro tri-axial force sensor which can be installed near the tip of the end effector. Performance of this micro-force sensor is presented
Keywords :
biology; force sensors; micromanipulators; position control; biology; biomicromanipulation; micromanipulation; micromanipulator; positioning system; tri-axial force sensor; Biomedical optical imaging; Dielectrophoresis; Electrostatics; Force control; Force sensors; Gravity; Inspection; Micromanipulators; Optical microscopy; Optical sensors;
Conference_Titel :
Robotics and Automation, 1999. Proceedings. 1999 IEEE International Conference on
Conference_Location :
Detroit, MI
Print_ISBN :
0-7803-5180-0
DOI :
10.1109/ROBOT.1999.774012
