Title :
Micromachined tools for nano technology. Twin nano-probes and nano-scale gap control by integrated microactuators
Author :
Kakushima, K. ; Mita, M. ; Kobayashi, D. ; Hashiguchi, G. ; Endo, J. ; Wada, Y. ; Fujita, H.
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Abstract :
This paper describes the fabrication and actuation of a novel device composed of twin nano probes. The size of the probes are 200 nm-high, 280 nm-wide and 5 /spl mu/m-long, which are formed by silicon anisotropic etching. The initial gap of about 400 nm between the probes become 84 nm when 101 mW input power was given to the thermal expansion micro actuators integrated with the probes. Precise motion down to 4 nm/mW was confirmed by simultaneous TEM observation.
Keywords :
etching; machine tools; microactuators; micromachining; nanotechnology; probes; thermal expansion; transmission electron microscopy; 101 mW; Si; TEM; fabrication; integrated microactuator; micromachined tool; nanoscale gap control; nanotechnology; silicon anisotropic etching; thermal expansion; twin nanoprobe device; Anisotropic magnetoresistance; Atomic force microscopy; Etching; Fabrication; Microactuators; Nanoscale devices; Probes; Scanning electron microscopy; Silicon; Transmission electron microscopy;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906536
