Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics

Author

Youngjoo Yee ; Jong U Bu ; Manhyo Ha ; Junghoon Choi ; Hyunho Oh ; Sangshin Lee ; Hyojin Nam

Author_Institution

Lab. of Devices & Mater., LG Electron. Inst. of Technol., Seoul, South Korea

fYear

2001

fDate

25-25 Jan. 2001

Firstpage

317

Lastpage

320

Abstract

An actuated micromirror having two-degree of freedom in rotational motion around the orthogonal axes is designed and fabricated. Suspended unimorph PZT actuators independently control the rotation of the micromirror along the two perpendicular axes. The PZT actuators located symmetrically around the axes of the actuation are mechanically isolated with each other during their operation by a gimbaled structure. The mechanical cross talk between each axis of actuation is well suppressed less than 7% due to the gimbals. The rotation angle /spl theta/ of the micromirror reaches 0.75/spl deg/ under the applied bias of 15 V while maintaining the profile of the reflected laser beam without significant degradation.

Keywords

micro-optics; microactuators; mirrors; 15 V; PZT; PbZrO3TiO3; actuated micromirror; free space optics; gimbaled structure; mechanical cross talk; orthogonal axes; perpendicular axes; reflected laser beam; rotation angle; two-axis rotational motion; Communication switching; Fabrication; Fasteners; Micromirrors; Mirrors; Optical bistability; Optical devices; Optical network units; Optical switches; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on

Conference_Location

Interlaken, Switzerland

ISSN

1084-6999

Print_ISBN

0-7803-5998-4

Type

conf

DOI

10.1109/MEMSYS.2001.906542

Filename

906542