Title :
A mechanical impact of coatings on membranes
Author :
Hansen, M.S. ; de Reus, R. ; Eriksen, G.F. ; Bouwstra, S.
Author_Institution :
Mikroelektronik Centret, Tech. Univ. Denmark, Lyngby, Denmark
Abstract :
The mechanical impact of coatings containing residual stress on membranes is investigated. Closed-form formulas describing this impact are presented and verified using both finite element modeling and physical experiments. Theory and experiments are in good agreement. Thus, a simple tool for design of coated pressure sensors is provided.
Keywords :
impact (mechanical); internal stresses; membranes; piezoresistive devices; pressure sensors; protective coatings; closed-form formulas; coated pressure sensors; finite element modeling; mechanical impact; membranes; physical experiments; residual stress; Biomembranes; Capacitive sensors; Coatings; Finite element methods; Mechanical sensors; Piezoresistive devices; Protection; Residual stresses; Solid modeling; Thin film sensors;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906553
