• DocumentCode
    2916166
  • Title

    Optimisation of a two-wire thermal sensor for flow and sound measurements

  • Author

    van Honschoten, J.W. ; Krijnen, G.J.M. ; Svetovoy, V.B. ; de Bree, H.-E. ; Elwenspoek, M.C.

  • Author_Institution
    MESA Res. Inst., Twente Univ., Enschede, Netherlands
  • fYear
    2001
  • fDate
    25-25 Jan. 2001
  • Firstpage
    523
  • Lastpage
    526
  • Abstract
    The Microflown is an acoustic sensor measuring particle velocity instead of pressure, which is usually measured by conventional microphones. In this paper an analytical model is presented to describe the physical processes that govern the behaviour of the sensor and determine its sensitivity. The Microflown consists of two heaters that act simultaneously as sensors. Forced convection by an acoustic wave leads to a small perturbation of this temperature profile, resulting in a temperature difference between the two sensors. This temperature difference, to which the sensitivity is proportional, is calculated with perturbation theory. Consequently the frequency dependent behaviour of the sensitivity is analysed; it is found that there are two important corner frequencies, the first related to the time constant velocity of heat diffusion between the sensors, the second related to the heat capacity of the heaters. The developed model is verified by experiments. Previously a very good model has been given for the performance of the Microflown in a channel, i.e. with both heaters between fixed walls walls in the positive and negative z-direction. Here, a model is presented that describes the situation of the present used sensors: without walls under and above them. Model predictions are compared to experimental results.
  • Keywords
    acoustic transducers; flow measurement; microphones; microsensors; particle velocity analysis; perturbation theory; temperature sensors; Microflown; acoustic sensor; analytical model; corner frequency; design optimisation; flow measurement; heat capacity; heat diffusion; heater; microphone; particle velocity measurement; perturbation theory; sensitivity; sound measurement; temperature distribution; time constant; two-wire thermal sensor; Acoustic measurements; Acoustic sensors; Analytical models; Microphones; Particle measurements; Pressure measurement; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
  • Conference_Location
    Interlaken, Switzerland
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-5998-4
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2001.906594
  • Filename
    906594