Thermoelectric micro power generator utilizing self-standing polysilicon-metal thermopile

A prototype self-standing polysilicon-metal junction thermopile has been developed. In order to realize ideal higher thermal isolation, a thermopile without a membrane and having self-standing structure is proposed. The hot and cold contacts in the proposed thermopile are reversible. The thermocouple is composed of an n-type polysilicon and an Au junction. The thermopile was fabricated by MICS (Micromachine Integrated Chip Service: three polysilicon layers structure) organized by the Cooperative Research Committee for Standardization of Micromachines in IEE of Japan. Output characteristics were measured as a function of distance between hot contact of the thermocouple and the radiation source, in order to confirm performance of the proposed thermopile as a micro power generator. Experimental results were in good agreement with the calculations.