Title :
Electrostatic impact-drive microactuator
Author :
Mita, M. ; Arai, M. ; Tensaka, S. ; Kobayashi, D. ; Basset, Philippe ; Kaiser, A. ; Masquelier, P. ; Buchaillot, L. ; Collard, D. ; Fujita, H.
Author_Institution :
Tokyo Univ., Japan
Abstract :
A fully packagable micromachined actuator was developed for generating precise but unlimited displacement. A suspended silicon mass is encapsulated between glass plates and driven by electrostatic force. By hitting a stopper, it generates impact force to drive the whole actuator in a small step (/spl sim/10 nm). It is a micromachined and electrostatic version of the impact-drive actuator.
Keywords :
electrostatic actuators; elemental semiconductors; encapsulation; microactuators; micromachining; silicon; Si; electrostatic impact-drive microactuator; encapsulation; fully packagable micromachined actuator; glass plates; suspended silicon mass; Acceleration; Actuators; Electrodes; Electrostatics; Friction; Glass; Microactuators; Silicon; Suspensions; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Conference_Location :
Interlaken, Switzerland
Print_ISBN :
0-7803-5998-4
DOI :
10.1109/MEMSYS.2001.906610
