SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss

Author

Chen, Qian ; Shang, Xiaobing ; Tian, Yanjun ; Xu, Jie ; Lancaster, Michael J.

Author_Institution

Sch. of Phys. Electron., Univ. of Electron. Sci. & Technol. of China, Cheng du, China

Volume

49

Issue

7

fYear

2013

fDate

March 28 2013

Firstpage

480

Lastpage

482

Abstract

Presented is a WR-3 band (220-325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE₁₀₁ mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.

Keywords

Chebyshev filters; band-pass filters; micromachining; millimetre wave filters; waveguide filters; Chebyshev response; SU-8 micromachined WR-3 band waveguide bandpass filter; SU-8 photoresist micromachining technique; TE<;sub>101<;/sub> mode; coupled resonator filter; frequency 220 GHz to 325 GHz; frequency 300 GHz; low insertion loss; noise figure 20 dB; off-set waveguide resonator; passband return loss;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el.2013.0277

Filename

6504975