A PWB-based MEMS switched filter bank using lumped element embedded passives

Printed wiring board (PWB)-based MEMS RF switches were developed using modified processes and similar materials as used for high density interconnect/embedded passives (HDI/EP) components. By constructing cantilever-beam electrostatic mechanisms, single-pole single throw through single-pole four-throw RF switches were developed with suitable performance in the microwave band. Combining these switches with embedded lumped element filter components using the same substrate materials, a switched filter bank was simulated, fabricated, and measured results shown.