Multi-model optimization in SWIM

Author

White, K., Jr. ; Fowler, John W.

Author_Institution

Dept. of Syst. Eng., Virginia Univ., Charlottesville, VA, USA

Volume

1

fYear

1994

fDate

2-5 Oct 1994

Firstpage

221

Abstract

Improving the design and operation of semiconductor manufacturing facilities typically requires the application and integration of results derived from a range of related factory models. The Semiconductor Workbench for Integrated Modeling (SWIM) is an innovative software system that simplifies the task of working with multiple models. This paper describes the research and development leading to the incorporation of model optimization features with the SWIM framework

Keywords

computer aided production planning; digital simulation; optimisation; semiconductor device manufacture; simulation; software packages; SWIM; Semiconductor Workbench for Integrated Modeling; hierarchical models; multi-model optimization; semiconductor manufacturing; simulation; software system; Application software; Computational modeling; Computer aided manufacturing; Computer integrated manufacturing; Design engineering; Optimization methods; Power system modeling; Production facilities; Software systems; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Man, and Cybernetics, 1994. Humans, Information and Technology., 1994 IEEE International Conference on

Conference_Location

San Antonio, TX

Print_ISBN

0-7803-2129-4

Type

conf

DOI

10.1109/ICSMC.1994.399840

Filename

399840