DocumentCode :
2919852
Title :
Carbon nanotube arrays on flexible substrate and their field emission characteristics
Author :
Chen, Ting-Hsien ; Lu, Sheng-Yi ; Lin, Chia-Min ; Hsu, Wen-Kuang ; Fang, Weileun
Author_Institution :
Inst. of NanoEngineering & MicroSystems, Hsinchu
fYear :
2008
fDate :
13-17 Jan. 2008
Firstpage :
697
Lastpage :
700
Abstract :
This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.
Keywords :
carbon nanotubes; chemical vapour deposition; elemental semiconductors; field emission displays; flexible electronics; polymer films; silicon; sputter etching; substrates; O2 plasma etching; carbon nanotube arrays; carbon nanotube devices; chemical-vapor-deposition; electrical measurements; field emission measurements; flexible FED; flexible substrate; ohmic conductors; parylene; polymer blend; polymer film; Carbon nanotubes; Chemical vapor deposition; Conductors; Current measurement; Electric variables measurement; Plasma applications; Plasma chemistry; Plasma measurements; Polymer films; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Conference_Location :
Tucson, AZ
ISSN :
1084-6999
Print_ISBN :
978-1-4244-1792-6
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2008.4443752
Filename :
4443752
Link To Document :
بازگشت