Air flow senser for an insect-like flapping wing

Author

Takahashi, Hidetoshi ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao

Author_Institution

Univ. of Tokyo, Tokyo

fYear

2008

fDate

13-17 Jan. 2008

Firstpage

916

Lastpage

919

Abstract

This paper reports on a thin piezoresistive cantilever for measuring air flow velocity around flapping wings. To measure the air flow velocity at a point of the wing directly, our sensor was attached to the leading edge of the wing. The sensor was designed to be 1 mum thick. Because of the scale effect, the influence of the inertial force was small during flow measurement. The sensor had the sensitivity of 0.56 - 0.96 times 10^-3 (m/s)^-2 as well as the directivity. By using the micro flow sensor, we measured the perpendicular air flow velocity at the point of the leading edge of the wing.

Keywords

biomimetics; cantilevers; flow measurement; flow sensors; microsensors; piezoelectric devices; air flow velocity measurement; air microflow sensor design; inertial force; insect-like flapping wing; micro flow sensor; thin piezoresistive cantilever; Etching; Fluid flow measurement; Force measurement; Force sensors; Gold; Insects; Piezoresistance; Sensor phenomena and characterization; Silicon; Velocity measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on

Conference_Location

Tucson, AZ

ISSN

1084-6999

Print_ISBN

978-1-4244-1792-6

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2008.4443806

Filename

4443806