SAW properties of quartz homeotypes with epitaxial films

Author

Wallofer, W. ; Krempl, P.W.

Volume

1

fYear

1994

fDate

Oct. 31 1994-Nov. 3 1994

Firstpage

411

Abstract

Among the homeotypic crystals group of quartz, berlinite (AlPO₄) and GaPO₄, epitaxial growth has been shown to be possible. The SAW velocities, coupling constants and temperature coefficients of Rayleigh-like and Love waves in such substrates with thin epitaxial films have been calculated. For GaPO₄ or AlPO ₄, on quartz, temperature compensated Love wave substrates are predicted with a coupling that more than doubles the value attainable with ST cuts of one of the involved materials. The layered substrates feature dispersion, but no beam steering and very good temperature stability

Keywords

Love waves; Rayleigh waves; acoustic materials; aluminium compounds; epitaxial growth; epitaxial layers; gallium compounds; quartz; substrates; surface acoustic wave transducers; ultrasonic velocity; ultrasonic velocity measurement; AlPO₄; GaPO₄; Love waves; Rayleigh-like waves; SAW properties; SAW velocities; ST cuts; SiO₂; coupling constants; dispersion; epitaxial films; epitaxial growth; interdigital transducer; layered SAW device; quartz homeotypes; temperature coefficients; temperature compensated Love wave substrates; temperature stability; Acoustic velocity measurement; Aluminum materials/devices; Epitaxial growth; Gallium materials/devices; Quartz materials/devices; Surface acoustic wave materials; Surface acoustic wave transducers; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE

Conference_Location

Cannes, France

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1994.401620

Filename

401620