Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

Author

Noell, Wilfried ; Sun, Winston ; De Rooij, Nico ; Herzig, Hans Peter ; Manzardo, Omar ; Dändliker, René

Author_Institution

Inst. of Microtechnology, Neuchatel Univ., Switzerland

Volume

2

fYear

2002

fDate

10-14 Nov. 2002

Firstpage

580

Abstract

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.

Keywords

integrated optics; micro-optics; micromachining; micromirrors; optical attenuators; silicon-on-insulator; MOEMS; SOI based batch fabrication; Si-SiO₂; microelectromechanical systems; micromachining; monolithic bulk silicon structures; monolithic horizontal micromirrors; monolithic microoptics; monolithic vertical micromirrors; optical MEMS; optical functionality; temperature change insensitivity; variable optical attenuator; Micromechanical devices; Microoptics; Optical attenuators; Optical devices; Optical filters; Optical pumping; Optical refraction; Optical sensors; Optical variables control; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE

ISSN

1092-8081

Print_ISBN

0-7803-7500-9

Type

conf

DOI

10.1109/LEOS.2002.1159440

Filename

1159440