• DocumentCode
    2922720
  • Title

    Laser micromachining

  • Author

    Harvey, E.C.

  • Author_Institution
    Exitech Ltd., Oxford, UK
  • fYear
    1997
  • fDate
    35528
  • Firstpage
    42430
  • Lastpage
    42431
  • Abstract
    Lasers are often used for precision machining and with the growth of activity in Microengineering the development of laser micromachining techniques has accelerated. At the simplest level lasers are used for precision drilling and welding in a wide variety of materials, but new techniques enable complex 3D patterns to be fabricated on planar or non-planar workpieces. Many different types of lasers can be used; the choice is usually determined by cost and throughput considerations as well as the machining resolution required. Although most laser systems can be used in some form or another to perform micromachining the major industrial laser systems, carbon dioxide (CO2), neodymium YAG (Nd:YAG) and excimer, have the most developed techniques and will be the focus of this presentation
  • Keywords
    laser beam machining; laser micromachining; microengineering;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
  • Conference_Location
    Birmingham
  • Type

    conf

  • DOI
    10.1049/ic:19970429
  • Filename
    640895