DocumentCode
2922720
Title
Laser micromachining
Author
Harvey, E.C.
Author_Institution
Exitech Ltd., Oxford, UK
fYear
1997
fDate
35528
Firstpage
42430
Lastpage
42431
Abstract
Lasers are often used for precision machining and with the growth of activity in Microengineering the development of laser micromachining techniques has accelerated. At the simplest level lasers are used for precision drilling and welding in a wide variety of materials, but new techniques enable complex 3D patterns to be fabricated on planar or non-planar workpieces. Many different types of lasers can be used; the choice is usually determined by cost and throughput considerations as well as the machining resolution required. Although most laser systems can be used in some form or another to perform micromachining the major industrial laser systems, carbon dioxide (CO2), neodymium YAG (Nd:YAG) and excimer, have the most developed techniques and will be the focus of this presentation
Keywords
laser beam machining; laser micromachining; microengineering;
fLanguage
English
Publisher
iet
Conference_Titel
Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
Conference_Location
Birmingham
Type
conf
DOI
10.1049/ic:19970429
Filename
640895
Link To Document