Title :
Theoretical and experimental results of an electrostatic micro motor with large gear ratio fabricated by the LIGA process
Author :
Wallrabe, U. ; Bley, P. ; Krevet, B. ; Menz, W. ; Mohr, J.
Author_Institution :
Kernforschungszentrum Karlsruhe, Inst. fur Mikrostrukturtechnik, Germany
Abstract :
It is known that the extension of the LIGA process by a sacrificial layer technique allows the fabrication of movable microstructures with great structural height without the need to assemble individual components. With this technique an electrostatic stepping micro motor has been fabricated and tested. The design of the motor has been optimized with regard to large torque by finite-element-method calculations. The radii of the rotor and the axle have been adjusted to the step width of the motor in order to realize a rolling movement of the rotor on the axle, which minimizes the friction
Keywords :
X-ray lithography; electrostatic devices; finite element analysis; micromechanical devices; stepping motors; LIGA process; X-ray lithography; electrostatic micro motor; finite-element-method; large gear ratio; large torque; micromachining; movable microstructures; optimized; sacrificial layer technique; stepping micro motor; Assembly; Axles; Design optimization; Electrostatics; Fabrication; Micromotors; Microstructure; Rotors; Testing; Torque;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187705
