Title :
MOEMS Reflective Type Variable Optical Attenuator
Author :
Ming-Hung, Chen ; Bing-Ru, Chen ; Wu-Zheng, Guo ; Jing-yi, Chen ; Yan-Hao, Huang ; Hsiao-Wen, Lee
Author_Institution :
Opto-Electronics & Systems Laboratories, Industrial Technology Research Institute, Taiwan, Email. cmh@itri.org.tw
Abstract :
A reflective type VOA is demonstrated in this paper. The VOA MOEMS device comprises two parts, electrode and mirror, and bonding by solder. The mirror part is made by SOI wafer to get excellent reflective plane. This VOA operates below at 1OV for 45dB attenuation with good optical performance, low insertion loss, low PDL 0.2dB@15dB, and low WDL 0.7dB@15dB.
Keywords :
Collimators; Micromechanical devices; Mirrors; Optical attenuators; Optical fiber devices; Optical fiber networks; Optical fiber polarization; Optical fibers; Optical scattering; Page description languages;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569742
