Title :
Applications of AlN thin-film resonator topologies as antennas and sensors
Author :
Weber, R.J. ; Burns, S.G. ; Campbell, C.F. ; O´Toole, R.
Author_Institution :
Dept. of Electr. Eng. & Comput. Eng., Iowa State Univ., Ames, IA, USA
Abstract :
The authors report on two novel microwave applications of thin-film resonator (TFR) technology. The first application is the use of an array of TFRs as an on-wafer, phased-array antenna; the second is a gas and chemical mass sensor with nanogram sensitivity.<>
Keywords :
aluminium compounds; antenna phased arrays; crystal resonators; electric sensing devices; gas sensors; mass measurement; microstrip antennas; microwave antenna arrays; piezoelectric transducers; solid-state microwave devices; thin film devices; AlN; bulk acoustic wave resonator; chemical mass sensor; gas sensor; microwave applications; nanogram sensitivity; onwafer antenna; phased-array antenna; thin-film resonator topologies; Antenna arrays; Application software; Chemical sensors; Chemical technology; Dielectric losses; Phased arrays; Sensor arrays; Silicon; Thin film sensors; Topology;
Conference_Titel :
Microwave Symposium Digest, 1992., IEEE MTT-S International
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
0-7803-0611-2
DOI :
10.1109/MWSYM.1992.187934
