Title :
Room-temperature Preparation of β-FeSi2 Microdroplets-containing Films via Excimer Laser Deposition and Annealing
Author :
Narazaki, A. ; Sato, T. ; Kawaguchi, Y. ; Niino, H.
Author_Institution :
National Institute of Advanced Industrial Science and Technology (AIST), Japan; narazaki-aiko@aist.go.jp
Abstract :
Room-temperature fabrication of a β-FeSi2microdroplets-containing film was achieved by the active use of micro-droplets. Successive laser annealing increased the Raman intensity from the β-FeSi2droplets up to fivefold, indicating further improvement in crystallinity.
Keywords :
Annealing; Crystallization; Laser ablation; Pulsed laser deposition; Scanning electron microscopy; Spectroscopy; Substrates; Surface emitting lasers; Surface morphology; Temperature;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Conference_Location :
Tokyo, Japan
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569809
