Title :
Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers
Author :
Sasaki, Osami ; Arakawa, Yousuke ; Suzuki, Takamasa
Author_Institution :
Faculty of Engineering, Niigata University, Japan; osami@eng.niigata-u.ac.ip
Abstract :
A sensor using sinusoidal phase-modulation of 1.5MHz generated by modulating the injection current of a laser diode measures a phase of the interference signal with a measuring time of 0.25μs and an error less than 20nm in displacement.
Keywords :
Current measurement; Diode lasers; Displacement measurement; Optical fiber sensors; Optical fibers; Optical interferometry; Optical sensors; Phase measurement; Signal generators; Time measurement;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569858