Title :
Laser microfabrication of photoresist rod array using a microlens array
Author :
Matsuo, Shigeki ; Miyamoto, Takashi ; Tomita, Takuro
Author_Institution :
The University of Tokushima, Japan; matsuos@eco.tokushima-u.ac.jp
Abstract :
Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.
Keywords :
Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical films; Optical pulses; Resists; Scanning electron microscopy; Substrates; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569869
