Title :
Laser micromachining of transparent glasses and aluminum with ps-pulse bursts at 1054 nm
Author :
Herman, P.R. ; Lapczyna, M. ; Breitling, D. ; Schittenhelm, H. ; Tan, H.W. ; Kerachian, Y. ; Marjoribanks, R.S.
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Abstract :
Summary form only given. This paper compares the micromachining of transparent glasses and aluminum foils with an ultrahigh repetition rate (133 MHz) burst of picosecond pulses at /spl lambda/=1054 nm. The material selection presents interesting contrasts in micro-via formation for brittle and ductile material classes. Fluences were applied in the range tens of J/cm/sup 2/ and up to 10 kJ/cm/sup 2/, and compared with single 1.2-ps pulse micromaching.
Keywords :
aluminium; foils; high-speed optical techniques; laser ablation; laser beam etching; laser beam machining; micromachining; optical glass; 1054 nm; Al; aluminum foils; laser ablation; laser micromachining; micro-via formation; picosecond pulses; plume absorption effects; rapid etching rates; transparent glasses; ultrahigh repetition rate burst; Aluminum; Glass; Laser ablation; Micromachining; Steel;
Conference_Titel :
Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
1-55752-634-6
DOI :
10.1109/CLEO.2000.907417
