Title :
A piezo-resistive resonant MEMS amplifier
Author :
van Beek, J.T.M. ; Phan, K.L. ; Verheijden, G. J A M ; Koops, G.E.J. ; van der Avoort, C. ; van Wingerden, J. ; Badaroglu, D. Ernur ; Bontemps, J.J.M. ; Puers, R.
Author_Institution :
TSMC Res. Center, NXP Semicond., Eindhoven
Abstract :
A MEMS resonator using electrostatic to piezo-resistive transduction is demonstrated to be capable of simultaneous signal filtering and amplification. The mechanical resonance serves as a high Q electrical filter, while the piezo-resistive readout allows for signal amplification. Amplification factors up to 4.6 dB and Q values up to 60,000 are obtained for a 15 MHz resonator.
Keywords :
HF amplifiers; micromechanical resonators; piezoresistive devices; readout electronics; resonator filters; MEMS resonator; amplification factors; frequency 15 MHz; high Q electrical filter; mechanical resonance; piezo-resistive readout; piezoresistive resonant MEMS amplifier; piezoresistive transduction; signal amplification; signal filtering; Arm; Damping; Electrostatics; Frequency; Impedance; Micromechanical devices; Resonance; Resonator filters; Transconductance; Voltage;
Conference_Titel :
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2377-4
Electronic_ISBN :
8164-2284
DOI :
10.1109/IEDM.2008.4796782
