DocumentCode
293229
Title
A test structure for extraction of resistance matching properties
Author
Larsen, Frode ; Ismail, Mohammed ; Iranmanesh, Ali
Author_Institution
Dept. of Electr. Eng., Ohio State Univ., Columbus, OH, USA
Volume
5
fYear
1994
fDate
30 May-2 Jun 1994
Firstpage
209
Abstract
This paper describes a simple test structure for accurately determining the properties of any resistor structure for a given process. Experimental results are given for p-type diffused resistors in a p-well process, and n-type diffused and poly resistors in an n-well process in order to illustrate the extraction procedure and the level of accuracy achieved
Keywords
analogue integrated circuits; contact resistance; integrated circuit design; integrated circuit testing; monolithic integrated circuits; resistors; extraction procedure; n-type diffused resistors; n-well process; p-type diffused resistors; p-well process; polysilicon resistors; resistance matching properties; resistor structure; test structure; Conductivity; Contact resistance; Data mining; Electric resistance; Electrical resistance measurement; Ohmic contacts; Probes; Proximity effect; Resistors; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 1994. ISCAS '94., 1994 IEEE International Symposium on
Conference_Location
London
Print_ISBN
0-7803-1915-X
Type
conf
DOI
10.1109/ISCAS.1994.409341
Filename
409341
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