Title :
A test structure for extraction of resistance matching properties
Author :
Larsen, Frode ; Ismail, Mohammed ; Iranmanesh, Ali
Author_Institution :
Dept. of Electr. Eng., Ohio State Univ., Columbus, OH, USA
fDate :
30 May-2 Jun 1994
Abstract :
This paper describes a simple test structure for accurately determining the properties of any resistor structure for a given process. Experimental results are given for p-type diffused resistors in a p-well process, and n-type diffused and poly resistors in an n-well process in order to illustrate the extraction procedure and the level of accuracy achieved
Keywords :
analogue integrated circuits; contact resistance; integrated circuit design; integrated circuit testing; monolithic integrated circuits; resistors; extraction procedure; n-type diffused resistors; n-well process; p-type diffused resistors; p-well process; polysilicon resistors; resistance matching properties; resistor structure; test structure; Conductivity; Contact resistance; Data mining; Electric resistance; Electrical resistance measurement; Ohmic contacts; Probes; Proximity effect; Resistors; Testing;
Conference_Titel :
Circuits and Systems, 1994. ISCAS '94., 1994 IEEE International Symposium on
Conference_Location :
London
Print_ISBN :
0-7803-1915-X
DOI :
10.1109/ISCAS.1994.409341
