Microwave-based low-cost instrument for film thickness measurement

Author

Root, L.F. ; Kaufman, I.

fYear

1992

fDate

1-5 June 1992

Firstpage

1553

Abstract

The use of an inverted microstrip resonators for noncontacting real-time thickness measurement of thin liquid or solid films and coatings described by R.B. Hurley et al. (1989) has been developed into a low-cost instrument for general laboratory or industrial use. Although microwave based, the instrument described functions without microwave test equipment. Insight into the oscillator behavior was obtained by the use of equivalent circuits and an ABCD matrix technique while several options were considered for the frequency discrimination function. The system successfully determined the film thickness of water, enamel paint, silicone rubber, and copper sheet metal.<>

Keywords

microwave measurement; thickness measurement; ABCD matrix technique; coatings; equivalent circuits; film thickness measurement; frequency discrimination function; inverted microstrip resonators; liquid films; low-cost instrument; microwave-based instrument; oscillator behavior; real-time thickness measurement; solid films; Coatings; Equivalent circuits; Instruments; Laboratories; Microstrip resonators; Microwave devices; Microwave oscillators; Solids; Test equipment; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1992., IEEE MTT-S International

Conference_Location

Albuquerque, NM, USA

ISSN

0149-645X

Print_ISBN

0-7803-0611-2

Type

conf

DOI

10.1109/MWSYM.1992.188312

Filename

188312