Resonant transformation of acoustic waves observed for the diamond based HBAR

Author

Kvashnin, Gennagy ; Sorokin, Boris ; Telichko, Arseniy

Author_Institution

Technol. Inst. for Superhard & Novel Carbon Mater., Troitsk, Russia

fYear

2015

fDate

12-16 April 2015

Firstpage

396

Lastpage

401

Abstract

The resonant transformation of acoustic waves in “Al/AlN/Mo/(100) diamond” piezoelectric structure has been studied by means of 2D FEM simulation. The nature of arising acoustical modes has been defined by the detail investigation of fields of elastic displacements. It was shown that the appearance of strongest spurious resonant peaks at frequencies above the bulk acoustic overtones is concerned with Lamb-like modes within diamond substrate, excited on the critical frequencies. In these points Lamb mode transforms into standing plate wave. Experimental and calculated data are in good accordance.

Keywords

bulk acoustic wave devices; diamond; finite element analysis; surface acoustic wave resonators; vibrational modes; 2D FEM simulation; Al/AlN/Mo/(100) diamond piezoelectric structure; Lamb mode transform; acoustic waves; acoustical modes; bulk acoustic overtone; critical frequencies; diamond based HBAR; diamond substrate; elastic displacements; resonant transformation; standing plate wave; Acoustics; Aluminum nitride; Diamonds; Electrodes; III-V semiconductor materials; Resonant frequency; Substrates; 2D FEM simulation; AlN; HBAR; Lamb-like modes; UHF; diamond;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International

Conference_Location

Denver, CO

Print_ISBN

978-1-4799-8865-5

Type

conf

DOI

10.1109/FCS.2015.7138866

Filename

7138866