DocumentCode
2934544
Title
High Accuracy Micro-Displacement Sensor With Integrated Optics-based Detection Means
Author
Bellouard, Yves ; Said, Ali A. ; Dugan, Mark ; Bado, Philippe
Author_Institution
Center for Automation Technologies Rensselaer Polytechnic Institute 110, 8th Street, Troy, NY, 12180-3590 USA bellouard@cat.rpi.edu
fYear
2005
fDate
18-22 April 2005
Firstpage
850
Lastpage
854
Abstract
We present a high-precision monolithic glass micro-displacement sensor suitable for harsh or sensitive environment in general and electromagnetic radiation environment in particular. Our displacement sensor is made out of a single piece of glass through a two-steps process based on femtosecond laser illumination followed by chemical etching. This process is used to create for the first time integrated waveguided-optics and mechanical flexures within a three-dimensional glass body.
Keywords
Flexures; MEMS; MRI compatible sensor; Optical MEMS; harsh environment; Chemical lasers; Chemical sensors; Electromagnetic radiation; Glass; Integrated optics; Mechanical sensors; Optical detectors; Optical sensors; Ultrafast optics; Waveguide lasers; Flexures; MEMS; MRI compatible sensor; Optical MEMS; harsh environment;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation, 2005. ICRA 2005. Proceedings of the 2005 IEEE International Conference on
Print_ISBN
0-7803-8914-X
Type
conf
DOI
10.1109/ROBOT.2005.1570223
Filename
1570223
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