DocumentCode
2936610
Title
Delamination from process induced sources
Author
Cheung, Annette Teng
Author_Institution
Sch. of Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong
fYear
1999
fDate
1999
Firstpage
816
Lastpage
822
Abstract
Former studies on delamination have seldom addressed the issue of delamination caused by contamination in terms of what the contaminants are and where they originate. It is however imperative that process engineers involved in the assembly of electronic packaging understand these problems so they can minimize yield loss and reject rates. With the aid of time-of-flight secondary ion mass spectrometry (TOF-SIMS), five delaminated units from different Asian factories were all diagnosed to be contaminated with polydimethylsiloxane (PDMS). PDMS is a widely used chemical agent that has extremely low surface tension and viscosity, which makes it very mobile on surfaces. Possible sources of PDMS from materials used in the assembly line are identified by TOF-SIMS in this paper. The ability of PDMS to transfer to wafer surfaces is revealed by TOF-SIMS analysis. Also, PDMS can cause delamination in molded units as checked with the aid of scanning acoustic microscopy
Keywords
acoustic microscopy; assembling; delamination; packaging; secondary ion mass spectra; surface contamination; time of flight mass spectra; PDMS; TOF secondary ion mass spectrometry; TOF-SIMS analysis; assembly; chemical agent; delamination; electronic packaging; molded units; polydimethylsiloxane; process induced sources; reject rates minimisation; scanning acoustic microscopy; surface contamination; time-of-flight mass spectrometry; wafer surfaces; yield loss minimisation; Assembly; Chemicals; Delamination; Electronics packaging; Mass spectroscopy; Microscopy; Production facilities; Surface contamination; Surface tension; Viscosity;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 1999. 1999 Proceedings. 49th
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
0-7803-5231-9
Type
conf
DOI
10.1109/ECTC.1999.776276
Filename
776276
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