• DocumentCode
    2936610
  • Title

    Delamination from process induced sources

  • Author

    Cheung, Annette Teng

  • Author_Institution
    Sch. of Eng., Hong Kong Univ. of Sci. & Technol., Hong Kong
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    816
  • Lastpage
    822
  • Abstract
    Former studies on delamination have seldom addressed the issue of delamination caused by contamination in terms of what the contaminants are and where they originate. It is however imperative that process engineers involved in the assembly of electronic packaging understand these problems so they can minimize yield loss and reject rates. With the aid of time-of-flight secondary ion mass spectrometry (TOF-SIMS), five delaminated units from different Asian factories were all diagnosed to be contaminated with polydimethylsiloxane (PDMS). PDMS is a widely used chemical agent that has extremely low surface tension and viscosity, which makes it very mobile on surfaces. Possible sources of PDMS from materials used in the assembly line are identified by TOF-SIMS in this paper. The ability of PDMS to transfer to wafer surfaces is revealed by TOF-SIMS analysis. Also, PDMS can cause delamination in molded units as checked with the aid of scanning acoustic microscopy
  • Keywords
    acoustic microscopy; assembling; delamination; packaging; secondary ion mass spectra; surface contamination; time of flight mass spectra; PDMS; TOF secondary ion mass spectrometry; TOF-SIMS analysis; assembly; chemical agent; delamination; electronic packaging; molded units; polydimethylsiloxane; process induced sources; reject rates minimisation; scanning acoustic microscopy; surface contamination; time-of-flight mass spectrometry; wafer surfaces; yield loss minimisation; Assembly; Chemicals; Delamination; Electronics packaging; Mass spectroscopy; Microscopy; Production facilities; Surface contamination; Surface tension; Viscosity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 1999. 1999 Proceedings. 49th
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    0-7803-5231-9
  • Type

    conf

  • DOI
    10.1109/ECTC.1999.776276
  • Filename
    776276